发明名称 PHOTOSENSITIVE RESIN COMPOSITION
摘要 A photosensitive resin composition containing an alkali- soluble resin and a photosensitive agent containing a quinoneazide group, characterized in that the photosensitive agent comprises a mixture of two or more esters from tetrahydroxybenzophenone and 1,2-naphthoquinonediazide sulfonic acid, which esters have different average degrees of esterification. The photosensitive agent preferably comprises a photosensitive agent (A) which is an ester from tetrahydroxybenzophenone and 1,2-naphthoquinonediazide-5-sulfonic acid having an average degree of esterification of X % (50 </= X </= 100) and a photosensitive agent (B) which is an ester from the same components as those in the case of (A) having an average degree of esterification of Y % (25 </= Y </= (X - 10)), in a A:B mixing ratio of 10 to 90 : 90 to 10.
申请公布号 WO0237185(A1) 申请公布日期 2002.05.10
申请号 WO2001JP08924 申请日期 2001.10.11
申请人 CLARIANT INTERNATIONAL LTD.;TAKAHASHI, SHUICHI;IKEMOTO, JUN;SHIODA, HIDEKAZU;KAWATO, SHUNJI 发明人 TAKAHASHI, SHUICHI;IKEMOTO, JUN;SHIODA, HIDEKAZU;KAWATO, SHUNJI
分类号 C08K5/07;C08K5/42;C08L101/00;G03F7/022;G03F7/023;H01L21/027;(IPC1-7):G03F7/022 主分类号 C08K5/07
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