| 摘要 |
PROBLEM TO BE SOLVED: To provide an anomaly detector for piezoelectric actuator that is capable of detecting anomalies in a piezoelectric actuator without fail and enables enhancement of the safety thereof. SOLUTION: The anomaly detector for actuator is provided with a drive circuit 1 that applies high voltages to a piezoelectric actuator 2 formed, by laminating a plurality of piezoelectric bodies that expand and contract according to applied voltages and accumulates electric charges there, or discharges the accumulated electric charges, an applied voltage detection circuit 3 that detects voltages actually applied to the piezoelectric actuator 2, a control device 10 that outputs to the driving circuit 1 applied voltage signals to cause the piezoelectric actuator 2 to start the application of high voltages or discharging, and an applied voltage signal detection circuit 4 that detects the applied voltage signals outputted from the control device 10. The actual applied voltages, detected through an anomaly judgment circuit 5 and the applied voltage signals, are compared with each other. Under normal conditions, the actual waveforms thereof are almost the same, and if an anomaly occurs, the waveform of the actual applied voltages gets out of shape. Therefore, anomalies can be detected by comparing them. |
