| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma processing system, in which an insulating plate having a not so high a thermal conductivity, can be cooled efficiently. SOLUTION: The plasma processing system comprises a processing container 32, which can be evacuated by opening the ceiling part, an insulating plate 72 fixed airtightly to the ceiling opening of the processing container, a table 34 for mounting an article W to be processed disposed in the processing container, a planar antenna member 76 disposed above the insulating plate and introducing microwaves for generating plasma from a plurality of microwave radiation holes 90 made at a prescribed pitch through the insulating plate into the processing container, and a gas-supply means 48 for introducing a prescribed gas into the processing container wherein the insulating plate is split into a plurality of split pieces each supported, at the periphery thereof, by a support frame member 73 having a channel 100 for feeding a heating medium. According to the arrangement, insulating plate having not so high a thermal conductivity can be cooled efficiently. |
