发明名称 RELIABILITY TESTING METHOD AND RELIABILITY TESTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a reliability testing method and a reliability testing device which shorten a reliability test, improve the precision and efficiency thereof. SOLUTION: The reliability testing device is provided with a Peltier element heating or cooling a sample mounted on a printed board, a thermocouple for measuring the temperature of the sample, a device for controlling current made to flow to the Peltier element, a device for measuring temperature through the thermocouple, a device for measuring the conduction resistance of the test sample, and a mechanism for performing collection and processing of the output data. The Peltier element is directly stuck on the sample to be tested, the temperature load of low temperature and high temperature is repeatedly applied on the sample by controlling current made to flow to the Peltier element, and the change of the conduction resistance of the test sample is measured while temperature cycle load is applied locally.
申请公布号 JP2002134668(A) 申请公布日期 2002.05.10
申请号 JP20000327303 申请日期 2000.10.26
申请人 NEC CORP 发明人 OTA HIROTOKU
分类号 H01L23/38;(IPC1-7):H01L23/38 主分类号 H01L23/38
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