MECHANICAL QUANTITY SENSOR ELEMENT, LOAD SENSOR ELEMENT, ACCELERATION SENSOR ELEMENT, AND PRESSURE SENSOR ELEMENT

摘要

A mechanical quantity sensor element which can measure a mechanical quantity with high accuracy while ensuring insulation of a pressure sensitive body easily. The mechanical quantity sensor element integrally comprises a composite ceramic pressure sensitive body (11) produced by dispersing a material exhibiting pressure resistance effect into a matrix of electrically insulating ceramic material, and an electrically insulating pressure receiving body (12) arranged on the pressure receiving face of the pressure sensitive body (11).