EXCIMER UV PHOTO REACTOR

摘要

An excimer UV photo reactor which has a reactive gas supplying means (1) for supplying a reactive gas (C) only to an active region (A1) on a body (A) to be irradiated. In the excimer UV photo reactor, a photochemical reaction of the reactive gas (C) with excimer UV is accelerated in a low temperature atmosphere and also the reactive gas (C) is not consumed in vain since it is not supplied to a region (A2) where no active photchemical reaction takes place, and therefore, a gas supplying source having a relatively small capacity may be sufficient for the excimer UV photo reactor. Accordingly, the above reactor can be used for practicing a photochemical reaction in an apparatus having simpler structure, at a lower temperature atmosphere and with safety.