发明名称 OVERCURRENT PROTECTIVE CIRCUIT AND ALIGNER
摘要 PROBLEM TO BE SOLVED: To protect the load from momentary load increasing and continuous over-loading. SOLUTION: This aligner is featured in that it has a current detector (Rs, 41) to detect the overcurrent in the load to protect, a first decision circuit (A1) to output the first overcurrent signal when the current detector detects the momentary current exceeding the first threshold, a filter circuit (42) to filter the load current detected by the detector circuit, a second decision circuit (A2) to output the second overcurrent signal when the filtered load current produced by the filter circuit exceeds the second threshold, and a protective circuit (43) to protect the load depending on the first and second overcurrent signals.
申请公布号 JP2002135965(A) 申请公布日期 2002.05.10
申请号 JP20000316880 申请日期 2000.10.17
申请人 NIKON CORP 发明人 SHIMAMURA NAOTAKA;MOTOTSUGU RYUZO
分类号 G03F7/20;H01L21/027;H02H3/08;H02P7/00;H02P29/02 主分类号 G03F7/20
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