| 摘要 |
PROBLEM TO BE SOLVED: To provide a low thermal expansion material having high specific rigidity and sufficient conductivity in order to realize a precision mechanical member being lightweight and having high dimensional accuracy under an environment requiring high cleanliness. SOLUTION: The conducive low thermal expansion ceramic sintered compact contains a β-eucryptite phase 1 in an amount of >=75 and <=90 volume %, the remainder other than the β-eucryptite phase which is composed of carbon or a compound (carbon compound 2) containing carbon except SiC and the SiC particles 3, and provided with an absolute value of thermal expansion coefficient of <=1.0×10-7/K in the temperature range of 0 to 50 deg.C, a volume specific resistivity of <=1.0×107 Ωcm and a specific rigidity of >=50 GPa/g/cm3. |
