LATCH SWITCHING DEVICE IN FOUP OPENER

摘要

PROBLEM TO BE SOLVED: To prevent a latch key and a keyway from being rubbed and collided each other and dust harmful for a wafer from being made when pulling the latch key out of the keyway in a latch mechanism of a FOUP door and inserting the latch key into the keyway, in a latch switching device of a FOUP opener. SOLUTION: Two latch keys 76 supported to freely pivot and a driving mechanism for these latch keys 76 are provided. The driving mechanism is comprised of a driving shaft 71 supported to freely pivot in the center between these keys 76, two link mechanisms 72 made of two transfer links 73, 74 for respectively transferring the pivot movement of the driving shaft 71 to these keys 76 to pivot each of these keys 76, a rotating means for rotating the driving shaft 71 and a stopping means for stopping the driving shaft 71 rotating at a predetermined position. When these keys 76 return to each of initial positions of the pivot movement, the pivot movement of these keys 76 in the driving mechanism passes over the initial position to return the initial position again and stop.