| 摘要 |
PROBLEM TO BE SOLVED: To eliminate the influence of micropipes, and to manufacture the silicon carbide rectifying element of a large area, using a silicon carbide substrate including the micropipe. SOLUTION: Ions whose conductivity type is opposite to that of a surface layer are injected into the surface near the part of the micropipes 17 and the peripheral region. They are heat-treated and a re-crystallized area 18 is formed, or the surface exposure part of the micropipes is covered by an insulation film. |
