发明名称 HIGH THERMAL CONDUCTIVE SILICON NITRIDE CERAMIC AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To obtain a silicon nitride sintered body which enables the densification and grain growth of a sintered body by a low temperature sintering of <=1900 deg.C, and has a high thermal conductivity of >=100 W/mK. SOLUTION: When a high thermal conductive silicon nitride sintered body is manufactured so that the densification and grain growth of a sintered body are enabled by low temperature sintering of <=1900 deg.C, the silicon nitride powder wherein the sintering agent which contains at least silicon nitride magnesium (MgSiN2) is added, is molded. Subsequently, sintering the silicon nitride powder at a temperature of <=1900 deg.C, the densely sintered body which has a high thermal conductivity of >=100 W/mK, is obtained.
申请公布号 JP2002128569(A) 申请公布日期 2002.05.09
申请号 JP20000318912 申请日期 2000.10.19
申请人 NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL & TECHNOLOGY 发明人 HIRAO KIYOSHI;HAYASHI HIROYUKI;ITAYA SEIJI
分类号 C04B35/584;H01L23/13;H05K1/03 主分类号 C04B35/584
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