| 摘要 |
PROBLEM TO BE SOLVED: To restrain the amount of deformation at the center part of a movable part in a micro semiconductor actuator. SOLUTION: A mirror 5 is formed at the center part of the turnable movable part 3 pivotally supported by the torsion bars 4 and 4 of a planar type galvano mirror 1, and a coil for driving 6 is wound round the periphery of the mirror 5. By providing a boundary part 10 restraining warping force by the effect of air resistance or inertial force at the end of the movable part and heat generated in the coil 6 from being transmitted to the center part of the movable part between the mirror 5 and the coil 6, the deformation at the center part of the movable part is restrained.
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