THIN FILM MAGNETIC FIELD SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a magnetic field sensor having a simple constitution and high magnetic field detection sensitivity and no error due to temperature variation and capable of detecting the absolute value of impressed magnetic field intensity. SOLUTION: A conductive film 6 is arranged on both sides of a large magnetic field resistance thin film, an element 10 provided with electric terminals 8 and 9 is introduced and a bridge circuit consisting of an element 5 and the element 10 as two arms is formed. Although the sensitivity for a magnetic field of electric value of the element 10 is practically zero in a small magnetic field, electric resistance value variation due to a cause other than magnetic field impression is equal to the element 5. The output voltage of the bridge is proportional to the difference of the electric resistance values of the element 5 and 10 and so variation causes other than those of magnetic field impression such as temperature variation of the large magnetic resistance thin film are cancelled from the output voltage of the bridge. Thus an exact impressed magnetic field value can be obtained.