| 摘要 |
PROBLEM TO BE SOLVED: To provide a diaphragm valve in which the increase of pressure loss is prevented despite of increase of a gas flow rate. SOLUTION: The diaphragm valve is provided with a valve 36 which is interlocked with a diaphragm 29 to open and close a gas entrance channel 24 and a gas exit channel 25, a solenoid 38 which forces a diaphragm 29 to operate, and a differential pressure detection sensor 43 which detects differential pressure between a gas entrance channel 24 and a gas exit channel 25. Detection of the specified level or more of differential pressure by the differential pressure detection sensor 43 actuates the solenoid 38 and operates the diaphragm 29 to release the valve 36. Even if a gas flow rate is increased, the increase of pressure loss can be prevented by releasing the valve 36.
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