| 摘要 |
PROBLEM TO BE SOLVED: To set the oscillating range of an oscillating actuator with high accuracy. SOLUTION: Since a stopper 46a is of cylindrical shape with a circular section, the contact point of regulate surfaces 51, 52 and a stopper 46a contact surface 53a is placed in the inside of the oscillating radius of an oscillating axis for the stopper 46a. Accordingly, the contact point is displaced in the direction of moving away from the regulate surfaces 51, 52. Therefore, the rotation angle of a table, that is the deflection angle of the table, in response to the screwing amount of shock absorbers 47, 48 becomes small, and thereby the oscillating actuator can arrange the operating range or the stop position with high accuracy.
|
