发明名称 METHOD FOR REUSING INORGANIC POWDER FOR PHOTOSENSITIVE PASTE
摘要 PROBLEM TO BE SOLVED: To reduce the cost of photosensitive paste by recovering inorganic powder from waste developer after using the photosensitive paste and using the photosensitive paste again. SOLUTION: By using this inorganic powder recovering method, the photosensitive paste which has excellent developing ability and good pattern accuracy after development, where the residue of organic substance after calcination is little, and which has excellent adhesion is provided even in the case of using the inorganic powder recovered from the waste developer.
申请公布号 JP2002131927(A) 申请公布日期 2002.05.09
申请号 JP20000323714 申请日期 2000.10.24
申请人 NIPPON KAYAKU CO LTD 发明人 MORI SATORU;YOKOSHIMA MINORU
分类号 G03F7/004;B09B5/00;C08G59/16;C08J5/18;C08K3/00;C08L63/00;G03F7/027;G03F7/26 主分类号 G03F7/004
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