| 摘要 |
PROBLEM TO BE SOLVED: To realize elemental analysis and structure analysis by one X-ray equipment by utilizing X rays having nondestructive/noncontact features. SOLUTION: There are comprised a common X-ray generation source 1, a collimator 3 for reducing primary X rays, an energy dispersion type X-ray detector 9 as an element-analyzing means for fluorescent X-ray analysis, a CCD line sensor 6 as a structure-analyzing means for X-ray diffraction, a sample observation optical system for confirming the measurement position of a minute part, and a control/calculation part 11 for analyzing respective results. |
