| 摘要 |
PROBLEM TO BE SOLVED: To provide a tool for calcinating an electronic part to remove a binder smoothly and to suppress a reaction between a zirconia surface layer and an electronic part, which is unable to be solved by a conventional performance adjustment of a surface layer by means of adjusting a grain size, with specifying a surface condition of the zirconia surface layer by a surface roughness (convexity and concave). SOLUTION: The surface roughness of the zirconia surface layer of the tool for calcinating the electronic part, which is comprised of a substrate, an intermediate layer coated on the substrate surface and the zirconia surface layer formed on the intermediate layer, is made 10 to 40 μm being indicated as a center line mean value. Without forming the intermediate layer, the zirconia surface layer may be formed directly on the substrate. |
