| 摘要 |
PROBLEM TO BE SOLVED: To provide a silicon carbide sintered compact and electrode with high density, high purity and moderate volume resistivity. SOLUTION: The sintered compact essentially contains elements belonging to 1-16 groups of the periodic table with atomic number >=3 (except elements with atomic numbers 5-8 and 14), whose total content is <=10 ppm, and has volume resistivity of 100-103 Ω.cm. A form obtained by adding boron compounds of 100-1,000 ppm (as boron), having density of >=2.9 g/cm3 and being usable as an electrode is preferable. The electrode consists of the above sintered compact. |
