RADIATION-SENSITIVE RESIN COMPOSITION

摘要

PROBLEM TO BE SOLVED: To provide a radiation-sensitive resist composition having superior resolving power and preservability and a radiation sensitive resist composition further having improved edge roughness. SOLUTION: Each of the radiation sensitive resist compositions contains a resin having a velocity of dissolution in an alkali developing solution increased by the action of an acid, a photo-acid generating agent, a solvent and a specified alicyclic or aromatic compound.