| 摘要 |
PROBLEM TO BE SOLVED: To provide a diaphragm type pump device enhancing the rigidity of the area of a diaphragm where stress concentration is likely to occur near a fixed outer peripheral portion, and capable of assuring the required delivery speed even if fluid of relatively high viscosity is handled, with the diaphragm comprising a piezoelectric element affixed to an elastic sheet-shaped base material. SOLUTION: In the pump device 1, the diaphragm 10 comprising the sheet- shaped piezoelectric element 13 affixed to a portion of the sheet-shaped elastic base material 11 is fixed at its outer periphery to the wall part of a case 2 provided with a suction port 5 and a delivery port 7, whereby a pump chamber Rp is formed by the diaphragm and the case. By applying a drive signal to the piezoelectric element, the diaphragm is elastically deflected and displaced using the fixed outer peripheral portion as a fulcrum and the capacity of the pump chamber is varied to provide pumping action. A reinforcing portion 12 is provided in a peripheral edge area of a predetermined width as measured from the outer periphery of the diaphragm.
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