| 摘要 |
PROBLEM TO BE SOLVED: To measure position and speed of three-dimensional particle in an measured area in a three-dimensional way by using single imaging means. SOLUTION: In a position measuring apparatus of three-dimensional particle, He-Ne laser 1 and Ar-ion laser 2 are used to change continuously the intensity of the laser 1, 2 in the z-axial direction by ND filters 8, 9 respectively. The laser 1, 2 are synthesized by a miller 10 and a beam-splitter 11 to radiate into a measured area 12. In the area 12, a CCD camera 13 is arranged in the direction. Scattered light from a micro particle responds to an output level ratio of two colors, so that a position in the direction is obtained based on the ratio and a three-dimensional coordinate is obtained.
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