ELECTROSTATIC CHUCK HAVING NO STICKING

摘要

PURPOSE: An electrostatic chuck(ESC) having no sticking is provided to eliminate an additional process for removing a sticking phenomenon by making the ESC perform the same function as an ESC having three electrodes when power is applied to the ESC and by eliminating a potential difference between respective constituting elements of a wafer and the ESC when power is not applied to the ESC. CONSTITUTION: A non-conducting ceramic unit(21) is formed on an aluminum body unit(24). A conductive ceramic unit(22) in contact with the wafer(35) is positioned in the center of the upper portion of the aluminum body unit. The first and second electrodes(23,33) are positioned at the right and left sides with respect to the conductive ceramic unit. The first switching device discharges the potential of the first electrode to the aluminum body unit by using a signal made by dividing the voltage of the second electrode. The second switching device discharges the potential of the second electrode to the aluminum body unit by using a signal made by dividing the voltage of the first electrode. The third switching device discharges residual charges of the wafer passing through the conductive ceramic unit to the aluminum body unit by using a signal made by dividing the voltage of the second electrode.