摘要 |
PROBLEM TO BE SOLVED: To provide a rolling-element bearing for vacuum equipment which enhanced in durability. SOLUTION: In the rolling-element bearing comprising an outer ring 1, an inner ring 2, a plurality of rolling bodies 3 disposed between the inner and outer rings, and a holder 4 that holds the rolling bodies equally and separately in the peripheral direction, the rolling body 3 is made of ceramics. Among the surface of the rolling body 3, the track face of the outer ring 1 and the track face of the inner ring 2, at least the surface of the rolling body 3 is coated with a thin film made of a solid lubricant, and the holder 4 is made of a composite material, containing 5 to 40 weight-percent of one or more kinds of solid lubricants selected from among fluorocarbon resin, molybdenum disulfide and graphite.
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