METHOD AND DEVICE FOR MEASURING FILM THICKNESS

摘要

PROBLEM TO BE SOLVED: To highly precisely and quickly measure and control the film thickness of a specimen in film production due to deposition by a device in which a structure around the specimen is simple. SOLUTION: The film thickness measuring device comprises a board 11, an electron gun 12 for primary electron irradiation, a deposition device 13 for specimen deposition and a secondary electron detector 14. The electron gun 12 has a function capable of setting primary energy from 10 eV to 30 keV.