| 摘要 |
PROBLEM TO BE SOLVED: To prevent unintentional diffraction phenomena due to uneven state of the surface at a boundary removed with a method removing one by one layer from the surface of multilayer film for specifically shaping a reflection wave front of a multilayer film reflection mirror. SOLUTION: For removing a layer, a method not causing a level difference at the boundary is used. More specifically, a small tool method or an ion beam fabrication method is applied. |
