发明名称 CRUCIBLE FOR MOLECULE BEAM EPITAXIAL DEVICE, AND MOLECULE BEAM EPITAXIAL DEVICE PROVIDED WITH THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a crucible for a molecule beam epitaxial device, whose simple structure may surely prevent the leakage of molecule beam material, and provide a molecular beam epitaxy(MBE) device using the same. SOLUTION: An outer crucible 2 is arranged so as to house the bottom part 1c of the inner crucible 1 in which molecule beam material is filled. Thereby even if the inner crucible 1 is broken, the molecule beam material flown out of the crucible 1 is received by the outer crucible 2 because the bottom part 1c of the inner crucible 1 is housed in the outer crucible 2.
申请公布号 JP2002128590(A) 申请公布日期 2002.05.09
申请号 JP20000320849 申请日期 2000.10.20
申请人 SHARP CORP 发明人 MIYAMUNE TAKAMITSU
分类号 C30B23/08;C23C14/22;H01L21/203;(IPC1-7):C30B23/08 主分类号 C30B23/08
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