| 摘要 |
PROBLEM TO BE SOLVED: To align substrates by externally moving substrates in XYθdirections outside of pressurizing plates while keeping only the space between the pressurizing plates in a sealed state. SOLUTION: The pressurizing plates 1, 2 holding two substrates A, B are moved nearer to each other so as to seal the space between the peripheral edges 1a, 2a of the plates by a movable sealing means 4 to form a section of a closed space S while the substrates A, B are moved nearer to each other to form a specified gap. Then while the air in the closed space S is evacuated, the pressurizing plates 1, 2 are relatively moved and adjusted in along XYθdirections to roughly align the substrates A, B. After a specified vacuum degree is obtained, the movable sealing means 4 is deformed to move the substrates A, B further nearer to each other the position where the gap between the substrates A, B is sealed with an annular adhesive C. In this state, the pressurizing plates 1, 2 are relatively moved and adjusted in the XYθdirections to finely align the substrates. Then the substrates are released from only one of the plates 1, 2 to return the closed space S to the atmospheric pressure so that the gap is uniformly pressed by the pressure difference between the inside and outside of the substrates A, B to form a specified gap.
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