发明名称 SENSOR, LIQUID STORAGE CONTAINER AND BUBBLING DETECTION METHOD
摘要 PROBLEM TO BE SOLVED: To provide a sensor, a liquid storage container and a bubbling detection method permitting effective monitoring of liquid condition in a container. SOLUTION: A liquid level sensor 18 is provided with four sensor probes 20a-21b and a monitoring unit 23 connected with those probes. The monitoring unit 23 contains a probe potential difference detecting section 25 detecting output potential differences in both sensor probes 20a/20b and 21a/21b, and a liquid level detecting section detecting fluid liquid level from the above detection result. Additionally the monitoring unit 23 contains a bubbling detection pulse generating section 28 detecting bubbling generation of the gas for bubbling from the detection result of the probe potential difference detecting section 25 to generate pulse signals and a pulse counter 29 counting the number of pulses generated on this bubbling detection pulse generating section 28, knowing the number of times of bubbling period in the gas for bubbling.
申请公布号 JP2002131113(A) 申请公布日期 2002.05.09
申请号 JP20000310858 申请日期 2000.10.11
申请人 APPLIED MATERIALS INC 发明人 SHIRAI YOSHIKATSU;MURAYAMA YUJI
分类号 G01F23/22;H01L21/205;(IPC1-7):G01F23/22 主分类号 G01F23/22
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