| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor inspection device capable of shortening the waiting time from voltage impression to measurement when a voltage impression current is measured for inspecting a DC characteristic. SOLUTION: For shortening the waiting time from voltage impression to the measurement of a current, a function of detecting a current converging state is provided in a DC measurement unit, and consequently, a minimum test time in the machine number by means of the same kind of tester can be realized.
|
