| 摘要 |
PROBLEM TO BE SOLVED: To obtain no only stable detection sensitivity of combustible gases with limited variations in the gas detection sensitivity between products but also a stable characteristic with a composition ratio between a heat transfer layer and a catalytic layer gained per specifications, and to achieve higher production efficiency by enabling production in an integrated thin film production process. SOLUTION: A gas detector 3 is constituted of a heater 8 which is formed in a zigzag on a substrate 2 to promote the combustion of a combustible gas and a multilayerd film 12, which is made up of an alternate lamination of a heat transfer layer 10 comprising a proper heat conductor and a catalytic layer 11, which generates heat according to the value of heat generated by the heater 8, transferred through the heat transfer layer to act as catalyst in the combustion of the combustible gas and is laminated on the heater 8 along the zigzag configuration thereof.
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