| 摘要 |
PURPOSE: A micro driving device is provided, which has an improved structure to assure a sufficient rotation angle by a low voltage. CONSTITUTION: The micro driving device comprises a frame(10) having an accommodation hole, an operation plate(20) installed on the accommodation hole, a pair of beam members(30) supporting the operation plate to be able to rotate as to the frame, a driving unit generating an external force to rotate the operation plate with a rotation axis(X) as a center, and a housing(40). The frame is supported on a base layer, and an insulation layer is formed between the base layer and the frame. The operation plate has a reflection surface(21) reflecting a light. One end of each beam member is connected to a tilted surface of the operation plate, and another end is supported on an anchor(17). The driving unit comprises an operation electrode prepared on an edge of the operation plate and a semi-electrode prepared in the accommodation hole of the frame.
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