| 摘要 |
PURPOSE: A control apparatus for plasma utilizing equipment is provided in which numerical information items measured by measuring devices can be complementarily and associatively used and the control operation can be accomplished at a high speed with high precision. CONSTITUTION: A control apparatus for plasma utilizing equipment comprises the first, second, and third communication links(11,12,13), a plasma detecting section(18) for detecting a state of plasma generated in a vacuum chamber of the plasma utilizing equipment, a member state detecting section(4) for detecting a state of a member to be processed, a utility detecting section, an energy control device(5), and a utility control device(8) for controlling the utility according to the control information.
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