| 发明名称 |
Flow control valve utilizing sonic nozzle |
| 摘要 |
<p>A flow control valve for a semiconductor manufacturing process, which valve utilizes a pressure sensor between the flow control valve and a subsequent sonic nozzle to detect the gas pressure which is fed back to the valve to control the flow through the valve. <IMAGE></p> |
| 申请公布号 |
EP0867796(B1) |
申请公布日期 |
2002.05.08 |
| 申请号 |
EP19970309587 |
申请日期 |
1997.11.27 |
| 申请人 |
AERA JAPAN LTD. |
发明人 |
KOMIYA, ISAMU;NAMBU, MASAHIRO |
| 分类号 |
F16K31/02;F16K31/06;G01F1/36;G05D7/01;G05D7/06;H01L41/08;(IPC1-7):G05D7/06 |
主分类号 |
F16K31/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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