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发明名称
摘要
申请公布号
JP2002513509(A)
申请公布日期
2002.05.08
申请号
JP19980521441
申请日期
1997.10.22
申请人
发明人
分类号
H01L21/48;H01L23/12;H01L23/538;H05K3/00;H05K3/42;H05K3/46;(IPC1-7):H05K3/46;H01L23/522
主分类号
H01L21/48
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代理人
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地址
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