发明名称 METHOD AND DEVICE FOR CLEANING WORK
摘要 PROBLEM TO BE SOLVED: To solve such a problem that many nozzles are necessary, a cleaning device, pipe arrangement, or the like, becomes complicated and large in size or the maintenance management of the cleaning device, or the like, becomes complicated when the nozzles are arranged at respective positions for cleaning the upper and lower surfaces and side surfaces of a work individually. SOLUTION: This method for cleaning the work comprises putting the work on a table which is used for cleaning the work from the upper and lower sides and has an opening through which water and air can pass, moving the table to a prescribed position, cleaning the work by spraying water toward at least the upper and lower surfaces and the right and left side surfaces of the work by using the nozzles, namely, cleaning all directions of the work, drying the cleaned work by using a rotary cleaning nozzle and moving the dried work from the prescribed position. In other words, all directions of the work can be cleaned almost at the same time by using many nozzles. As a result, the cleaning device, the pipe arrangement, or the like, can be simplified and miniaturized or the maintenance management of the cleaning device, or the like, can be made easy.
申请公布号 JP2002126663(A) 申请公布日期 2002.05.08
申请号 JP20000327264 申请日期 2000.10.26
申请人 FINE MACHINE KATAOKA KK 发明人 KATAOKA KEIJI
分类号 B08B3/02;H01L21/304;(IPC1-7):B08B3/02 主分类号 B08B3/02
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