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经营范围
发明名称
COOLED WINDOW
摘要
申请公布号
EP1203108(A1)
申请公布日期
2002.05.08
申请号
EP20000921006
申请日期
2000.05.11
申请人
STEAG CVD SYSTEMS LTD.
发明人
FIDELMAN, IGOR
分类号
C23C16/44;C23C16/48;C30B25/08;C30B31/10;H01L21/00;H01L21/205;(IPC1-7):C23C16/48
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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