发明名称 |
Monitoring and control system for production machines e.g. for semiconductor manufacture, has each machine coupled to host computer |
摘要 |
The production machines (FM) are connected to a multiplexer (Mi) that allows information to be periodically fed onto a communication bus . This connects with a number of host computers (H). These continuously monitor the statues of the production machines
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申请公布号 |
DE10049352(A1) |
申请公布日期 |
2002.05.08 |
申请号 |
DE2000149352 |
申请日期 |
2000.10.05 |
申请人 |
IPC FAB AUTOMATION GMBH |
发明人 |
RUPP, GERHARD |
分类号 |
G05B19/042;G05B19/048;G05B23/02;(IPC1-7):G05B19/042;G05B15/02 |
主分类号 |
G05B19/042 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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