PLASMA CLEANING APPARATUS

摘要

PROBLEM TO BE SOLVED: To easily assemble a plasma cleaning apparatus and to facilitate taking in and out operations of a product to be cleaned. SOLUTION: A chamber 3 of a plasma cleaning apparatus 1 is constituted of a moveable chamber section 5 in which an upper electrode 13 is arranged and a fixed chamber section 7 in which a lower electrode 15 is arranged and a product set stage 21 is also provided to place a product on the top surface of the stage 21. The section 5 is supported by a driving means 29 in a freely moveable manner in the up and down directions.