RADIO FREQUENCY POWER SOURCE FOR GENERATING AN INDUCTIVELY COUPLED PLASMA,申请号EP20000947241-传众专利搜索

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发明名称	RADIO FREQUENCY POWER SOURCE FOR GENERATING AN INDUCTIVELY COUPLED PLASMA
摘要
申请公布号	EP1203441(A1)	申请公布日期	2002.05.08
申请号	EP20000947241	申请日期	2000.07.12
申请人	TOKYO ELECTRON LIMITED	发明人	JOHNSON, WAYNE, L.;WEST, LEONARD, G.
分类号	H05H1/46;C23C16/507;H01J37/32;H01L21/205;H01L21/3065;H02M7/44;H02M7/533;(IPC1-7):H02M1/00	主分类号	H05H1/46
代理机构		代理人
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