| 摘要 |
PROBLEM TO BE SOLVED: To obtain an ink jet recording head which can eject a very small ink drop while enhancing the shooting accuracy of an ink drop. SOLUTION: At first, the linear part 12 of an ejection opening 3 is formed in a resin orifice film 2 by excimer laser machining. A metal or silicon substrate 9 for holding the orifice film 2 is then coated with adhesive 8 and bonded onto the holding substrate 9 such that the outlet face 5, where the outlet side 19 of the ejection opening 3 is formed, serves as the adhesive face. Subsequently, the orifice film 2 bonded to the holding substrate 9 is subjected to ion etching with an etching gas, i.e., a mixture gas of oxygen and chlorine, to form a curved part 14 on the inlet side 18 of the ejection opening 3. Finally, the holding substrate 9 and adhesive 8 are dissolved and removed.
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