ORGANIC MOLECULE DOPING METHOD AND APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a method which doping of organic molecules may be carried out without fail in a wide range of pressure regions from a high-vacuum region to atmospheric pressure by sufficiently removing the gaseous components adsorbed or sucked. to a base material to be treated, then introducing organic gas therein. SOLUTION: The base B material to be treated installed in a vacuum vessel 1 is maintained under a high-vacuum state to sufficiently remove the atmospheric component molecules adsorbed and sucked into the base material to be treated and thereafter the organic gas is introduced into the vacuum vessel to raise the pressure in the vacuum vessel from the high-vacuum state up to atmospheric pressure or the neighborhood thereof. An organic gas generator using a porous absorber adsorbed with an organic solvent is used as the apparatus at this time. Accordingly, the doping of the organic gas may be effectively carried out by once putting the base material to be treated into the high-vacuum state to remove the atmospheric component gas absorbed and sucked in the atmosphere, then introducing the organic gas and raising the pressure from the high-vacuum state to the atmosphere or the neighborhood thereof to exposure the base material to be treated to the gas.