| 摘要 |
<p>A first displacement mechanism (40a) disposed on the axially lower side includes a first piston (42a), a piston rod (44) displaceable integrally with the first piston (42a), and a diaphragm (46) connected to the piston rod (44). A second displacement mechanism (40b) disposed on the axially upper side includes a second piston (42b) for moving the piston rod (44) to slide along a through-hole (66). A displacement amount (S1) of the first piston (42a) and a displacement amount (S2) of the second piston (42b) are different. <IMAGE></p> |
