发明名称 Chip junction nozzle
摘要 A chip junction nozzle in that opposite slant planes 43 which come into contact with edges of 2 sides of the chip in parallel centering around a nozzle center, and a vacuum suction hole 42 opened in the nozzle center are provided, and the slant plane 43 is formed into a mirror surface having the surface hardness more than HrC40. Further, when the surface roughness of the mirror surface is expressed by the average roughness of the center line, the average roughness of the center line is not more than 1.6 mum.
申请公布号 US6382495(B2) 申请公布日期 2002.05.07
申请号 US20010774624 申请日期 2001.02.01
申请人 TDK CORPORATION 发明人 GOTOH MASASHI;KANAZAWA JITSUO;OKAZAKI KOICHIRO;MIZUNO TORU;ONOZEKI YOSHIHIRO
分类号 H01L21/60;H01L21/00;(IPC1-7):B23K1/06 主分类号 H01L21/60
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