发明名称 Optical component having a chemically etched guide with a ridge structure and its method of manufacture
摘要 The present invention concerns an optical component having at least one guide with a ridge structure obtained by chemical etching on a substrate made of semiconductor material, the ridge having a base and a top face, the guide having an outline with at least one curved section, the tangent at any point on the outline defining the local orientation (beta) of the guide. According to the invention, the width of the base (weff) of the ridge is substantially constant all along the guide and the width of the top face (w) of the ridge varies according to the local orientation (beta) of the guide with respect to the reference crystallographic direction (R) of the substrate.
申请公布号 US6383830(B2) 申请公布日期 2002.05.07
申请号 US20010789826 申请日期 2001.02.22
申请人 ALCATEL 发明人 BOUCHE NICOLAS;LOVISA STéPHANE
分类号 G02B6/12;G02B6/122;G02B6/13;G02B6/136;(IPC1-7):H01L21/00;G02B6/10 主分类号 G02B6/12
代理机构 代理人
主权项
地址