| 摘要 |
A chuck table includes a pedestal having a circular depression formed in an upper surface thereof, and a disk-like chuck plate positioned in the depression of the pedestal. The chuck plate is fixed in the depression of the pedestal by means of an adhesive interposed between a bottom surface of the depression of the pedestal and a lower surface of the chuck plate. A recess for accepting a surplus of the adhesive is formed in a lower end portion of a side surface of the depression of the pedestal.
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