| 摘要 |
In an apparatus for polishing a workpiece, by rotating the workpiece while pressing a press member against a back surface of a polishing tape and thereby pressing the polishing tape against the workpiece, a cartridge 72 which holds the press member 96 is provided, for improving the ability of the press member to follow the workpiece, with a rollable-type holding device 260 which holds the press member 96 such that the press member 96 is rollable about a rolling axis line LS which perpendicularly crosses, in a three-dimensional space, over a rotational axis line about which the workpiece 10 is rotated. During the polishing of the workpiece, the press member 96 is rolled relative to the cartridge 72, so that the press member 96 follows the workpiece 10.
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