| 摘要 |
The invention provides an aging socket, an aging cassette and an aging apparatus with which an aging system of a very low cost can be constructed and aging can be performed for any number of inspection object parts. The aging socket includes a base on which a mounting portion on which an imaging object part can be mounted is formed, and a heater and a temperature regulator incorporated in the base. A plurality of such aging sockets are disposed in a matrix on the aging cassette. One or a plurality of such cassettes on which such sockets are mounted are mounted in position into slots of the aging apparatus. Consequently, aging of any number of aging object parts mounted on the sockets of one or more cassettes can be performed by the aging apparatus.
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