| 发明名称 |
Probing of surface roughness |
| 摘要 |
A method for assessing a surface finish on a substrate. The method applies molecules that have an interaction with the substrate to the substrate. Then illuminating the surface of the substrate and monitoring the molecules on the surface of the substrate to determine the finish of the surface of the substrate.
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| 申请公布号 |
US6383816(B1) |
申请公布日期 |
2002.05.07 |
| 申请号 |
US19990437308 |
申请日期 |
1999.11.09 |
| 申请人 |
UNIVERSITY OF DELAWARE |
发明人 |
WIRTH MARY J.;CUPPETT COZETTE;DONESKI LEON |
| 分类号 |
G01N21/55;G01N31/00;(IPC1-7):G01N31/00 |
主分类号 |
G01N21/55 |
| 代理机构 |
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代理人 |
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| 主权项 |
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