发明名称 X-ray apparatus
摘要 A x-ray apparatus includes an x-ray source, an x-ray optical system, wherein the x-ray optical system extracts x-rays of a specific wavelength from the x-ray source and converts the x-rays into a beam, and an irradiation source that causes radiation to be incident on surfaces of optical elements contained in the x-ray apparatus.
申请公布号 US6385290(B1) 申请公布日期 2002.05.07
申请号 US19990395163 申请日期 1999.09.14
申请人 NIKON CORPORATION 发明人 KONDO HIROYUKI;KANDAKA NORIAKI
分类号 G03F7/20;(IPC1-7):G21K1/06 主分类号 G03F7/20
代理机构 代理人
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